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Introduction to Focused Ion Beams: Instrumentation, Theory, Techniques and Practice
Lucille A. Giannuzzi and Fred A. Stevie
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| Excerpt - page 1: "... OR 97124; 3NanoSpective Inc., Orlando, FL 32826. Abstract: The typical focused ion beam (FIB) instrument consists of a vacuum system, liquid metal ion source, ion column, stage, detectors, gas inlets, ..." | | See more references to Focused Ion Beam Systems in this book. |
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High Resolution Focused Ion Beams: Fib and Its Applications: The Physics of Liquid Metal Ion Sources and Ion Optics and Their Application to Focused I
Jon Orloff
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| Excerpt - page 5: "... 1979]. These effects lead both to energy broadening in the beam (known generically as the "Boersch ... the properties of a focusing system as an increase in the ... a low current, high resolution focused ion beam system, be compensated for by adjusting the focus of ..." | | See more references to Focused Ion Beam Systems in this book. |
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Coulomb Interactions in Focused Ion Beam Systems
Lucas Joseph Vijgen
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Engineering Thin Films and Nanostructures with Ion Beams (Optical Engineering)
Emile Knystautas
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| Excerpt - page 11: "... to important advances in the engineering of thin films with ion beams. The size of a spike ... on the use of a focused ion beam system that is gated to allow the passage of individual ions ..." | | See more references to Focused Ion Beam Systems in this book. |
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Modelling of Microfabrication Systems
R. Nassar and W. Dai
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| Excerpt - page 24: "... ij. This approach allows one to obtain solutions for large systems in a ..." | | See more references to Focused Ion Beam Systems in this book. |
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Effect of Disorder and Defects in Ion-Implanted Semiconductors: Electrical and Physiochemical Characterization, Volume 45 (Semiconductors and Semimetals)
Gerard Ghibaudo and Constantinos Christofides
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| Excerpt - page 3: "... be controlled by variations in the energies of the bombarding ions. Thereafter, the semiconductor body is ... the use of a deflection system which sweeps an ion beam focused to an appropriate cross section over the semiconductive body or ..." | | See more references to Focused Ion Beam Systems in this book. |
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Atom, Molecule, and Cluster Beams II: Cluster Beams, Fast and Slow Beams, Accessory Equipment, and Applications
Hans Pauly
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| Excerpt - page 6: "... neutralized-ion- beam system. From the ion source (1), in which ions may be produced by electron ... a gas discharge, an ion beam is extracted by a suitable electrostatic lens system (2) and focused onto the entrance aperture of a charge-exchange chamber (3). This ..." | | See more references to Focused Ion Beam Systems in this book. |
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Insulated Gate Bipolar Transistor IGBT Theory and Design (Ieee Press Series on Microelectronic Systems)
Vinod Kumar Khanna
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| Excerpt - page 436: "... focus is also much larger when compared to optical printing. Ion-beam lithography has the advantage of ... than to electrons. Ion lithography systems arc either of the scanning focused-beam type or mask-beam type. 8.2.6 Chemical Vapor Deposition of Polycrystalline ..." | | See more references to Focused Ion Beam Systems in this book. |
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Electron and Ion Microscopy and Microanalysis (Optical Engineering)
Lawrence Eugene Murr
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| Excerpt - page 107: "... instruments utilize electrostatic lenses as a major portion of the beam or image-forming system. While electron beams are usually focused with magnetic lenses, ion beams must be focused with electrostatic lenses because magnetic field ..." | | See more references to Focused Ion Beam Systems in this book. |
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Integrated Optics
Robert G. Hunsperger
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| Excerpt - page 71: "... 4.7 Methods for Fabricating Channel Waveguides 71 the-art focused ion-beam systems are capable of forming beam ... processing techniques such as maskless ion implantation and etching have been developed [4.94]. Problems 4.1 We ..." | | See more references to Focused Ion Beam Systems in this book. |
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Proceedings of the Seventh International Workshop on Inelastic Ion-Surface Collisions: Krakow, Poland, September 1988
M. Szymonski and R. Pedrys
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| Excerpt - page 21: "... and coworkers' predicted "skipping motion" for fast (v 1 vFermi) ion beams incident at grazing angles to ... of freedom of the scattering system. EXPERIMENTAL PROCEDURES The Si' ion ... an ion source, accelerated, and focused onto the (111) face of a Cu single crystal. This ..." | | See more references to Focused Ion Beam Systems in this book. |
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Hamiltonian Systems and Celestial Mechanics (HAMSYS-98): Proceedings of the III Annual Symposium
Mexico) International Symposium on Hamiltonian Systems and Celestial Mechanics (3rd : 1998 : Patzcuaro, J. Delgado, E. A. Lacomba, and E. Perez-Chavela
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Commercializing New Technologies: Getting from Mind to Market
Vijay K. Jolly
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| Excerpt - page 46: "... that of the development of a new and highly successful focused ion beam system by Seiko Instruments, Inc. (SII) recently. Long known as a ..." | | See more references to Focused Ion Beam Systems in this book. |
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Fundamentals and Applications of Microfluidics (Artech House Microelectromechanical Systems Library)
Nam-Trung Nguyen and Steve Wereley
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| Excerpt - page 119: "... of X-ray lithography to machine PMMA [125]. Furthermore, the laser beam can be used for sealing ... or making shadow masks. 3.4.1.2 Focused Ion Beam Micromachining In focused ion ... surface. In a typical FIB system, the ion beam is ejected from a liquid metal ion ..." | | See more references to Focused Ion Beam Systems in this book. |
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Hospitals in a Changing Europe (European Observatory on Health Care Systems Series)
European Observatory on Health Care Systems, Martin McKee, and Judith Healy
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Investing in Nanotechnology: Think Small. Win Big
Jack Uldrich
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| Excerpt - page 43: "... www. feicompan y com DESCRIPTION FEI manufactures and distributes focused ion beam systems (FIB), scanning electron microscopes (SEM), and dual beam systems (a ..." | | See more references to Focused Ion Beam Systems in this book. |
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Nanotechnology (AIP-Press S.)
Gregory L. Timp
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| Excerpt - page 167: "... is responsible for the high speed point-to-point deflection of the focused beam. At the focal plane a ... form the whole pattern. Focused ion beam systems (FEB) are similar in design to the e-beam system described ..." | | See more references to Focused Ion Beam Systems in this book. |
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Principles of Nano-Optics
Lukas Novotny and Bert Hecht
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| Excerpt - page 2: "... techniques, optical tweez- ers, high-resolution electron microscopes and lithography tools, focused ion beam milling systems and others. The increasing trend towards nanoscience and nanotechnology makes ..." | | See more references to Focused Ion Beam Systems in this book. |
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Frontiers in Nanoscale Science of Micron/Submicron Devices (NATO Science Series E:)
A.-P. Jauho and Eugenia V. Buzaneva
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| Excerpt - page 45: "... M., and Ishii. M. ( 1986): "Ionized Mg doping in molecular-beam epitaxy of GaAs", J. Appl. Phys. 59 (4), 1092-1095. 3. Narutn, D. and Pease, R. (1988): "A variable energy focused ion beam system for in-situ microfabrication", J. 6 Sci. Technol. B 6 (3), ..." | | See more references to Focused Ion Beam Systems in this book. |
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Semiconductor Device Processing: Technology Trends in the VLSI Era
R. Castellano
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| Excerpt - page 5: "... are established for proximity/contact aligners, scanning projection aligners, step-and-repeat aligners, E-beam systems, X-ray systems, and focused ion beam systems. Optical lithography will continue to dominate the lithography ..." | | See more references to Focused Ion Beam Systems in this book. |
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Microscopy of Semiconducting Materials 2001
A.G Cullis and J.L Hutchinson
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| Excerpt - page 233: "... of the completed solar cell devices were cut using a focused ion beam system and inspected using transmission electron microscopy. The TEM images of ..." | | See more references to Focused Ion Beam Systems in this book. |
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Semiconductor Quantum Well Intermixing: Material Properties and Optoelectronic Applications (Optoelectronic Properties of Semiconductors and Superlattices)
J. T. Lie
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| Excerpt - page 55: "... implantation on III-V diffusion. As gallium can be used in focused ion beam systems, for direct writing onto surfaces with fine feature sizes, it ..." | | See more references to Focused Ion Beam Systems in this book. |
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From Instrumentation to Nanotechnology (Developments in Nanotechnology)
J.W Gardner and H.T. Hingle
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| Excerpt - page 142: "... no means the only one: over 20 years ago directed ion beams were used to machine as ... technology is the use of focused ion beam systems for maskless ion beam machining. 142 ..." | | See more references to Focused Ion Beam Systems in this book. |
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Small Fatigue Cracks: Mechanics, Mechanisms and Applications
K.S. Ravichandran, R.O. Ritchie, and Y. Murakami
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| Excerpt - page 318: "... a polished surface. The testing machine employed was the first system developed, shown in the previous ... the sample root using a focused ion beam system (FIB, Seiko Instruments Industries Co. Ltd., SMI- 8100, Ga+ ..." | | See more references to Focused Ion Beam Systems in this book. |
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Failure Analysis of Integrated Circuits (The International Series in Engineering and Computer Science)
Lawrence C. Wagner
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| Excerpt - page 116: "... essentially allow electrical contact with all conductors that the FIB system can access. Use of e-beam or ion beam microscopes overcome both the ... the combination of a FIB (Focused Ion Beam) system for in-situ probe-point creation and repair with ..." | | See more references to Focused Ion Beam Systems in this book. |
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Chemistry and Microstructure of Solidified Waste Forms
Roger D. Spence
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| Excerpt - page 112: "... surface microanalysis.41 Because of their high brightness, the liquid metal ion sources have resulted in focused ion-beam systems with submicron spot sizes and current densities in excess of ..." | | See more references to Focused Ion Beam Systems in this book. |
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Handbook of Charged Particle Optics
Jon Orloff
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| Excerpt - page 3: "... to be accelerated or decelerated. They are widely used in focused ion beam systems (where they are more effective than magnetic lenses). And they ..." | | See more references to Focused Ion Beam Systems in this book. |
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Handbook of Silicon Semiconductor Metrology
Alain C. Diebold
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| Excerpt - page 13: "... defect review tool, the dual-column FIB-SEM (FIB is shorthand for "focused ion beam system"), and the whole-wafer-capable Auger-based defect review tool are examples of ..." | | See more references to Focused Ion Beam Systems in this book. |
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Nanotechnology and Nanoelectronics: Materials, Devices, Measurement Techniques
W.R. Fahrner
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| Excerpt - page 160: "... around 20 nm are asserted for mask writing with electron beams. In order to increase the ... must be replaced by FIB (focused ion beam) systems during further reduction in the structure size since the focusing ..." | | See more references to Focused Ion Beam Systems in this book. |
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Design and Manufacturing of Composites, Second Edition
Suong V. Hoa, S. V. Hoa, and H. Hamada
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| Excerpt - page 42: "... on the specimens was characterized using optical microscope, Micrion 2500 Focused Ion Beam System and Cameca SX-50 Electron Probe Microanalysis. 42 ..." | | See more references to Focused Ion Beam Systems in this book. |
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Current Methods in Forensic Gunshot Residue Analysis
A. J. Schwoeble, David L. Exline, and A J Schwoeble
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| Excerpt - Back Matter: "... London, U.K., 1948. Ludwig, N. and Wenz, W., Applications of focused ion beam systems in gunshot residue investigation, J. Forensic Sci., 44(1), 105-109, 1999. ..." | | See more references to Focused Ion Beam Systems in this book. |
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Proceedings: Microscopy and Microanalysis 2002
Microscopy Society of America
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| Excerpt - page 56: "... one of the key attributes of the dual beam focused ion beam (FIB). This FIB system has been developedto combine the ... fabrication capabilities of a highly focused ion beam. As focused ion beam technology has advanced, focused ..." | | See more references to Focused Ion Beam Systems in this book. |
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Regions, Globalization, and the Knowledge-Based Economy
John H. Dunning
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| Excerpt - page 276: "... Microelectronics Imaging and Analysis Centre (MIAC) in Edinburgh University, whose focused ion beam system enables the modification of prototype chips to assess the effects ..." | | See more references to Focused Ion Beam Systems in this book. |
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Quantum Dot Heterostructures
Dieter Bimberg, Marius Grundmann, and Nikolai N. Ledentsov
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| Excerpt - page 11: "... The electric field applied to the tip extracts an intense beam of ions which is focused by a series of lenses. ... lenses. A focused ion beam system usually includes a mass separator to select single charged and ..." | | See more references to Focused Ion Beam Systems in this book. |
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Electron Microscopy Analysis 2001
M. Aindow and C. J. Kiely
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| Excerpt - page 135: "... Road, United Kingdom, OX1 3PH ABSTRACT: The use of a focused ion beam system to mill a set of sequential 2dimensional cross-sections which can ..." | | See more references to Focused Ion Beam Systems in this book. |
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Specimen Handling, Preparation, and Treatments in Surface Characterization (Methods of Surface Characterization)
Alvin W. Czanderna, Cedric J. Powell, and Theodore E. Madey
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| Excerpt - page 61: "... T. Taito, T. Adachi, and S. Inoue, New applications of focused ion beam technique to failure analysis and ... of a focused ion beam system in a failure analysis environment, ISTFA '91: The I7th Intl. ..." | | See more references to Focused Ion Beam Systems in this book. |
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